Technical Program

Wednesday, May 29, 2019

Session 10: Dicing and Encapsulation Technologies
1:30 PM - 5:10 PM
Committee: Assembly & Manufacturing Technology

Session Co-Chairs:

Garry Cunningham
NGC
T +1-410-765-7859
Garry.Cunningham@ngc.com
Paul Tiner
Texas Instruments
T +1-469-471-3565
p-tiner@ti.com

Papers:

1. 1:30 PM - A More than Moore Enabling Wafer Dicing Technology
Jeroen van Borkulo - ASM Pacific Technology
Rogier Evertsen - ASM Pacific Technology
Richard van der Stam - ASM Pacific Technology

2. 1:55 PM - Plasma Dicing Integration Schemes for Scribe Lane Layout and the Impact on Die Strength
David Parker - STMicroelectronics

3. 2:20 PM - Advanced Dicing Technologies for Combination of Wafer-to-Wafer and Collective Die to Wafer Direct Bonding
Fumihiro Inoue - IMEC
Alain Phommahaxay - IMEC
Arnita Podpod - IMEC
Samuel Suhard - IMEC
Hitoshi Hoshino - Disco Hi-Tech Europe GmbH
Berthold Moeller - Disco Hi-Tech Europe GmbH
Erik Sleeckx - IMEC
Kenneth June Rebibis - IMEC
Andy Miller - IMEC
Eric Beyne - IMEC

4. 3:30 PM - Active Control of NCF Fillet Shape for 3D CoW by Multibeam Laser Bonder
Keiko Ueno - Hitachi Chemical Company, Ltd.
Kazutaka Honda - Hitachi Chemical Company, Ltd.
Tsuyoshi Ogawa - Hitachi Chemical Company, Ltd.

5. 3:55 PM - Ultrafast Laser Scribe: An Improved Metal and ILD Ablation Process
Julia Chiu - Intel Corporation
Tyler Osborn - Intel Corporation
Aaron Gore - Intel Corporation
Daragh Finn - Electro Scientific Industries, Inc.
David Lord - Electro Scientific Industries, Inc.
Jon Mellen - Electro Scientific Industries, Inc.

6. 4:20 PM - Reliability and Benchmark of 2.5D Non-Molding and Molding Technologies
Yu-Hsiang Hsiao - Advanced Semiconductor Engineering Inc.
Che-Ming Hsu - Advanced Semiconductor Engineering Inc.
Yi-Sheng Lin - Advanced Semiconductor Engineering Inc.
Chien-Lin Chang Chien - Advanced Semiconductor Engineering Inc.

7. 4:45 PM - Laser-Induced Trench Design, Optimisation and Validation for Restricting Capillary Underfill Spread in Advanced Packaging Configurations
Gul Zeb - Université de Sherbrooke
David Danovitch - Université de Sherbrooke
Eric Turcotte - IBM Canada Ltd.